Courses Detail Information

ECE4140J – Introduction to MEMS


Lei Shao;Yu-Chih Chen

Credits: 3 credits

Pre-requisites: (MATH2160J Obtained Credit||MATH2560J Obtained Credit||MATH2860J Obtained Credit)&&(PHYS2400J Obtained Credit||PHYS2600J Obtained Credit)


Micro-electro-mechanical systems (MEMS), devices, and technologies. Micro-machining and microfabrication techniques, including planar thin-film processing, silicon etching, wafer bonding, photolithography, deposition, and etching. Transduction mechanisms and modeling in different energy domains. Analysis of micromachined capacitive, piezoresistive, and thermal sensors/actuators and applications.

Course Topics: