Courses Detail Information

ECE4140J – Introduction to MEMS

Instructors:

Lei Shao;Yu-Chih Chen

Credits: 3 credits

Pre-requisites: MATH2150J/255/285,ECE2150J,PHYS2400J

Description:

Micro-electro-mechanical systems (MEMS), devices, and technologies. Micro-machining and microfabrication techniques, including planar thin-film processing, silicon etching, wafer bonding, photolithography, deposition, and etching. Transduction mechanisms and modeling in different energy domains. Analysis of micromachined capacitive, piezoresistive, and thermal sensors/actuators and applications.

Course Topics: