Courses Detail Information
ECE4230J – Solid-State Device Laboratory
Instructors:
Credits: 4
Pre-requisites: ECE3110J
Description:
This course will cover basic principles of the fabrication processes for modern semiconductor devices and integrated circuits, and offer hands-on experience for semiconductor device fabrication and measurements.
Course Topics:
The course covers nearly all the key fabrication techniques including lithography, etching, deposition, oxidation, diffusion, and annealing, etc., thus equipping students with the knowledge required for engineers and scientists in the semiconductor industry. Where appropriate, the course describes how recent development in nanotechnology and fabrication techniques have enabled advanced semiconductor electronic devices.