Courses Detail Information

ECE4230J – Solid-State Device Laboratory


Rui Yang;

Credits: 4

Pre-requisites: ECE3110J


This course will cover basic principles of the fabrication processes for modern semiconductor devices and integrated circuits, and offer hands-on experience for semiconductor device fabrication and measurements.

Course Topics:

The course covers nearly all the key fabrication techniques including lithography, etching, deposition, oxidation, diffusion, and annealing, etc., thus equipping students with the knowledge required for engineers and scientists in the semiconductor industry. Where appropriate, the course describes how recent development in nanotechnology and fabrication techniques have enabled advanced semiconductor electronic devices.